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A FeFET-Based Hybrid Memory Accessible by Content and by Address

Cedric Marchand , Ian O'Connor , Mayeul Cantan , Evelyn Breyer , Stefan Slesazeck et al.
IEEE Journal on Exploratory Solid-State Computational Devices and Circuits, 2022, 8 (1), pp.19-26. ⟨10.1109/JXCDC.2022.3168057⟩
Journal articles hal-03727669v1
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Modelling of vertical and ferroelectric junctionless technology for efficient 3D neural network compute cube dedicated to embedded artificial intelligence (Invited)

Cristell Maneux , Mukherjee Chhandak , Marina Deng , Maeva Dubourg , Lucas Réveil et al.
67th Annual IEEE International Electron Devices Meeting (IEDM 2021), Dec 2021, San Fransisco, United States. ⟨10.1109/IEDM19574.2021.9720572⟩
Conference papers hal-03408078v1

Influence of the electrode interface on the properties of ferroelectric HfZrO2

Jordan Bouaziz , Greta Segantini , Benoît Manchon , Rabei Barhoumi , Ingrid Cañero Infante et al.
High k Workshop 2022, NamLab, Sep 2022, Dresden, Germany
Conference papers hal-03775873v1
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Insertion of an Ultra‐thin Interfacial Aluminium Layer for the Realisation of a Hf0.5Zr0.5O2 Ferroelectric Tunnel Junction.

Benoît Manchon , Greta Segantini , Nicolas Baboux , Pedro Rojo Romeo , Rabei Barhoumi et al.
physica status solidi (RRL) - Rapid Research Letters, 2022, 16 (10), pp.2100585. ⟨10.1002/pssr.202100585⟩
Journal articles hal-03609773v1
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Ferroelectricity Improvement in Ultra-Thin Hf0.5Zr0.5O2 Capacitors by the Insertion of a Ti Interfacial Layer

Greta Segantini , Rabei Barhoumi , Benoît Manchon , Ingrid Cañero Infante , Pedro Rojo Romeo et al.
physica status solidi (RRL) - Rapid Research Letters, In press, 2100583, pp.2100583. ⟨10.1002/pssr.202100583⟩
Journal articles hal-03759538v1

Study of Polarisation and Conduction Mechanisms in Ferroelectric Hf0.5Zr0.5O2 Down to Deep Cryogenic Temperature 4.2 K

Benoit Manchon , Dorian Coffineau , Greta Segantini , Nicolas Baboux , Pedro Rojo Romeo et al.
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Conference papers hal-03719069v1

Comparative Study of sub-8 nm HZO-Based Ferroelectric Tunnel Junctions with Enhanced Ferroelectricity

Greta Segantini , Benoit Manchon , Rabei Barhoumi , Pedro Rojo Romeo , Ingrid Cañero Infante et al.
ISAF-PFM-ECAPD 2022, Jun 2022, Tours, France
Conference papers hal-03715029v1

Wake-Up Effect and Retention Evolutions of Hf0.5Zr0.5O2 Capacitor by Nanostructuration Engineering

Jordan Bouaziz , Greta Segantini , Benoit Manchon , Rabei Barhoumi , Infante Ingrid C. et al.
ISAF-PFM-ECAPD 2022, IEEE UFFC, Jun 2022, Tours, France
Conference papers hal-03715010v1

Fabrication process for sub-8 nm HfZrO2-based ferroelectric tunnel junctions with enhanced properties

Greta Segantini , Benoit Manchon , Rabei Barhoumi , Pedro Rojo Romeo , Ingrid Cañero Infante et al.
EMRS 2022 Spring Meeting - Symposium E : Adaptive materials and devices for brain-inspired electronics, European Materials Research Society, May 2022, Strasbourg, France
Conference papers hal-03690321v1

How to play on the fabrication process of HfZrO2 ferroelectric thin film to enhance its physical properties

Jordan Bouaziz , Greta Segantini , Benoit Manchon , Rabei Barhoumi , Ingrid Cañero Infante et al.
EMRS 2022 Spring Meeting - Symposium N: Synthesis, processing and characterization of nanoscale multi functional oxide films VIII and 6th E-MRS & MRS-J bilateral symposium, European Materials Research Society, May 2022, Strasbourg, France
Conference papers hal-03682220v1

Impact of a dielectric layer at TiN/HfZrO2 interface for ferroelectric tunnel junctions applications

Greta Segantini , Pedro Rojo Romeo , Benoit Manchon , Rabei Barhoumi , Damien Deleruyelle et al.
Journées de la matière condensée (JMC17), Société française de physique (SFP), Aug 2021, Rennes, France
Conference papers hal-03372588v1

Role of ultra-thin Ti and Al interfacial layers in HfZrO2 ferroelectric tunnel junctions

Greta Segantini , Benoit Manchon , Pedro Rojo Romeo , Rabei Barhoumi , Nicolas Baboux et al.
EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Conference papers hal-03368741v1

Huge reduction of wake-up effect in ferroelectric HfZrO2 nanostructures

Bertrand Vilquin , Nicolas Baboux , Pedro Rojo Romeo , Jordan Bouaziz
EMRS 2021 Fall Meeting, European Materials Research Society, Sep 2021, Warsaw, Poland
Conference papers hal-03351082v1

Nanostructuration effect on the properties of ferroelectric HfZrO2

Bertrand Vilquin , Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux
6th edition of the International Workshop of Materials Physics, The National Institute of Materials Physics (NIMP), Sep 2021, Bucarest, Romania
Conference papers hal-03351080v1
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FeFET based Logic-in-Memory: an overview

Cédric Marchand , Ian O'Connor , Mayeul Cantan , Evelyn T Breyer , Stefan Slesazeck et al.
2021 16th International Conference on Design & Technology of Integrated Systems in Nanoscale Era (DTIS), Jun 2021, Montpellier, France. pp.1-6, ⟨10.1109/DTIS53253.2021.9505078⟩
Conference papers hal-03323883v1
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Reduction of HfZrO2 capacitor wake-up effect

Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo , Bertrand Vilquin
Materials Challenges for Memory, Apr 2021, New York, United States.
Conference poster hal-03273119v1

Tracking polarization loss and imprint during electrical tests in sputtered TiN/HZO/TiN capacitors

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo
Novel high-k workshop applications, NamLab, Apr 2021, Dresden, Germany
Conference papers hal-03273116v1
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Prospects for energy-efficient edge computing with integrated HfO 2-based ferroelectric devices

Ian O'Connor , Mayeul Cantan , Cedric Marchand , Bertrand Vilquin , Bastien Giraud et al.
IFIP/IEEE International Conference on Very Large Scale Integration (VLSI-SOC), Oct 2018, Verona, Italy. ⟨10.1109/VLSI-SoC.2018.8644809⟩
Conference papers hal-01916992v1

The discovery of ferroelectricity in HfO2

Bertrand Vilquin , Nicolas Baboux , Pedro Rojo Romeo , Jordan Bouaziz
6th Conference of Bangladesh Crystallographic Association, Bangladesh Crystallographic Association, Jan 2021, Dhaka, Bangladesh
Conference papers hal-03111364v1

Physical chemistry of the TiN/Hf 0.5 Zr 0.5 O 2 interface

W. Hamouda , A. Pancotti , C. Lubin , L. Tortech , C. Richter et al.
Journal of Applied Physics, 2020, 127 (6), pp.064105. ⟨10.1063/1.5128502⟩
Journal articles cea-02480750v1

Ferroelectric HfO2 based devices fabrication and remaining issues

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pedro Rojo Romeo
IUMRS-ICA 2019, Sep 2019, Perth, Australia
Conference papers hal-02310137v1

Fabrication de dispositifs ferroélectriques à partir de HfO2 dopé et les problèmes en suspens

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pédro Rojo Romeo
Réunion thématique du GDR OXYFUN « Couches minces d'oxydes fonctionnels et applications en électronique et photonique », GDR OXYFUN, Oct 2019, Caen, France
Conference papers hal-02310135v1

Huge working pressure effect on the ferroelectric properties of RF sputtered hafnia/zirconia layers

Bertrand Vilquin , Jordan Bouaziz , Nicolas Baboux , Pédro Rojo Romeo , Lucian Pintilie et al.
High-k Workshop 2019, NamLab, Jun 2019, Dresden, Germany
Conference papers hal-02281215v1

Ferroelectric HfO2 based devices fabrication and remaining issues

Bertrand Vilquin , Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux
IEEE 39th International Conference on ELECTRONICS AND NANOTECHNOLOGY ELNANO-2019, IEEE, Apr 2019, Kyiv, Ukraine
Conference papers hal-02281214v1
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Dramatic impact of pressure and annealing temperature on the properties of sputtered ferroelectric HZO layers

Jordan Bouaziz , Pédro Rojo Romeo , Nicolas Baboux , Raluca Negrea , Lucian Pintilie et al.
APL Materials, 2019, 7 (8), pp.081109. ⟨10.1063/1.5110894⟩
Journal articles hal-02273286v1
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Characterization of ferroelectric hafnium/zirconium oxide solid solutions deposited by reactive magnetron sputtering

Jordan Bouaziz , Pedro Rojo Romeo , Nicolas Baboux , Bertrand Vilquin
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 2019, 37 (2), pp.021203. ⟨10.1116/1.5060643⟩
Journal articles hal-02062583v1